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Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)
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Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films) (edit title/settings)

by Ronald A. Powell, Stephen Rossnagel (?) (edit contributors)

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GENERAL DESCRIPTION OF THE SERIES Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect... read more

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The physical process tat we now call sputtering was first reported in 1852 by Sir William Robert Grove <1.1>, who described the effect as "cathodic disintegration."

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