Silicon Processing for the VLSI Era, Vol. 3:... by Stanley Wolf

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Volume 3: The Submicron MOSFET. Treats the topics of submicron MOSFET device physics and the relationship between such device physics and submicron MOSFET fabrication. DLC: Integrated circuits - Very large scale.

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Silicon Processing for the VLSI Era, Vol. 3: The Submicron MOSFET (edit title)

Stanley Wolf (?) (edit contributors)